RSP-150 Manual Opener
【Outline of Opener】
This is a jig to manually open and close RSP-150 (Reticle SMIF Pod).
【Features】
Possible to open/close by placing RSP-150 on Opener (this product) and moving handle lever left and right.
CLOSE
OPEN
【Specification】
| Main material | Alminum alloy / SUS |
| Outer dimension | 355(W) x 421(D) x 171(H)mm ※421mm includes handle lever rotation area |
| Weight | approx. 6kg |
RSP-200 Manual Opener
【Outline of Opener】
This is a jig to manually open and close RSP-200 (Reticle SMIF Pod).
【Features】
Possible to open/close by placing RSP-200 on Opener (this product) and moving handle lever left and right.
CLOSE
OPEN
【Specification】
| Main material | Alminum alloy / SUS |
| Outer dimension | 369(W) x 427(D) x 127(H)mm ※427mm includes handle lever rotation area |
| Weight | approx. 4.5kg |
FOUP Manual Opener
【Outline of Opener】
This is a jig to manually open and close FOUP (Front Opening Unified Pod) for 300mm wafer.
【Features】
- ・Possible to open/close by setting Opener (this product) on FOUP DOOR and rotating the handle (right).
- ・The removed DOOR can be temporarily placed in an upright position to maintain cleanliness.
CLOSE
OPEN
【Specification】
| Main material | Resin (engineering plastic) |
| Outer dimension | 453(W) x 83(D) x 173(H)mm ※173mm includes handle |
| Weight | approx. 850g |
Dainichi Shoji K.K. 